What You Need to Know About Semiconductor Industry Greenhouse Gas Emissions

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September 22, 2016 at 1:00 p.m. ET

Free to attend

Length: Approximately one hour

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The semiconductor industry’s response to perfluorinated compounds PFCs started in 1994 when DuPont, the supplier of the primary gas used in CVD chamber cleans, C2F6, issued a sales policy restricting sales after 12/31/96 “…only to those applications that contain and either recover or destroy” C2F6 subsequent to use. The sales policy started an industry effort to understand potential impacts of all fluorinated greenhouse gases used in semiconductor manufacturing and to develop methods to estimate and reduce emissions. The industry has worked on a global basis via the World Semiconductor Council to develop common PFC metrics, measurement methodologies and approaches to reduce emissions. Preferring a pollution prevention approach, the industry and its suppliers have evaluated and implemented when feasible process optimization, gas substitution, capture/recycle and abatement. The WSC also set a goal to reduce absolute PFC emissions by 10% from baseline levels by 2010. The WSC exceeded the 2010 goal, achieving a 32% reduction, largely by replacing carbon based PFC chamber cleaning gases with NF3 in new process equipment, optimizing processes to reduce gas consumption, and using alternative chemistries and installing abatement where feasible. The new WSC2020 target calls for the implementation of best practices to further reduce normalized emissions in 2020 by 30% from the 2010 aggregated baseline. How do the semiconductor industry’s greenhouse gas emissions compare to other sectors, what data uncertainties exist, and what can be done to cost effectively achieve further emissions reductions?


Debbie Ottinger, USEPA

Deborah Ottinger has worked on the U.S. Environmental Protection Agency’s (EPA’s) programs to protect climate and stratospheric ozone since 1991. She currently plays a key role in the implementation of EPA’s Greenhouse Gas Reporting Program (GHGRP), which requires large emitters and suppliers of greenhouse gases (GHGs) to monitor and report their emissions and supplies to EPA. She also manages the U.S. Emissions Inventory Program for fluorinated GHGs emitted from industrial processes.

Dr. Michael Czerniak, Environmental Solutions Business Development Manager, Edwards

Starting his professional career with Philips, initially in their UK R&D labs and subsequently in the fab in Nijmegen, Holland, Mike has worked in the semiconductor business since gaining his PhD in 1982. He had subsequent marketing roles at UK-based OEMs Cambridge Instruments, VSW and VG Semicon before joining Edwards 19 years ago. He has held various technical and marketing roles before starting his current role earlier this year.

David Speed, Distinguished Member of the Technical Staff, GLOBAL FOUNDRIES

David Speed is a Distinguished Member of the Technical Staff at GLOBALFOUNDRIES. He works in the corporate EHS group and represents GLOBALFOUNDRIES on a wide variety of environmental, health, and safety issues. He has a PhD in Environmental Engineering from UCONN, with BS and MS degrees from URI and RPI.

Sponsored by Edwards

Edwards is a leading developer and manufacturer of sophisticated vacuum system products, abatement solutions and related value-added services. Our products are integral to manufacturing processes for semiconductors, flat panel displays, LEDs and solar cells; are used within an increasingly diverse range of industrial processes including power, glass and other coating applications, steel and other metallurgy, pharmaceutical and chemical; and for both scientific instruments and a wide range of R&D applications.


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One thought on “What You Need to Know About Semiconductor Industry Greenhouse Gas Emissions


    As a lighting engineer I am concerned about the environmental foot print while manufacturing of LEDs as well in disposing off the unusable LEDs. Is some work being done on that?


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