Silicon carbide is one of the most interesting semiconductor materials in electrical power components for energy savings. Components are already in use today in hybrid cars and solar power inverters. The high efficiency of these components minimizes energy loss and makes green power economically feasible.
A new company, Epiluvac AB, has entered the scene with the ambition to supply the needed deposition equipment.
Much of the pioneering research around silicon carbide was done at Linköping University in Sweden, where the highly successful hot-wall CVD reactor type was developed. This reactor type has been successfully used all over the world by the most prestigious labs, and is well known for its supreme qualities.
The new company, Epiluvac AB, will continue the development of this reactor type. The complete team at Epiluvac has many years of experience developing hot-wall systems.
Today, Sweden has a unique cluster of companies and universities in the forefront of silicon carbide technology. The hot-wall CVD reactor has been the workhorse in R&D labs all over the world, and a large number of scientific papers have been published around material grown in them.
“We are convinced that Epiluvac AB will be able to supply the best possible CVD tools to R&D labs around the world,” says Bo Hammarlund, managing director of Epiluvac AB. “The system design during three decades has proven to meet the high expectations of the best researchers around the world.”
“It is also our ambition to stay in close contact with our customers in order to customize the tools for the specific needs. We have a lot of experience in doing this. With the unique cluster of silicon carbide companies we have in Sweden, we are also able to pick up new demands at an early stage for not only SiC but also GaN, AlN, and graphene.”
The hot-wall reactors have already proven to be successful tools for producing graphene. Epiluvac is one partner in the Strategic Innovation graphene program led by Chalmers University, Gothenburg.
Epiluvac AB offices and manufacturing facilities are located in the Ideon Science Park, Lund, Sweden, close to Lund University and the multi-disciplinary research centers ESS and Max IV in one of the most exciting research regions in Europe.
Are there any materials that I can read up on to understand processing of silicon carbide for high power devices, especially the hot-wall CVD reactor as mentioned in this article?