A variety of gases are used in semiconductor manufacturing for process reactions in chemical vapor deposition, etching, ion implantation and many other processes. They are also used for such diverse purposes as chamber cleaning and purging. Generally speaking, gases are classified as processes gases for the first set of applications and bulk gases for the second. Bulk gases are hydrogen, helium and nitrogen, for example, which can be produced on-site through air separation plants. Process gases are typically supplied in the familiar gas tanks, or sometimes gas tanker trailers if the volume required is high enough. In some parts of the world, underground piping is used to supply multiple fabs

Aside for the gas type, the most common concern is the purity of the gas. Purity is often discussed in the “number of nines” level of purity. Gases that are 99.999% pure, for example, are “five nines” purity, gases that are 99.9999% pure are “six nines” purity and so on. Alternatively, trance contaminants are measured in parts per million (ppm), parts per billion (ppb) or even parts per trillion (ppt). Higher levels of purity are, of course, more difficult to produce and are therefore more costly. They are also more difficult to measure accurately. An ongoing challenge in the semiconductor industry is that gas users — IC manufacturers — tend to specify the highest level of purity available, but it’s often unknown if that higher level of purity actually provides any kind of benefit to device performance or yield. Indeed, sometimes trace impurities have proved to have some kind of beneficial effect and removing them can actually decrease performance.

Another important aspect — some would say the most important aspect — is safety. Gases can be toxic, carcinogenic, flammable, pyrophoric, corrosive and generally hazardous. A silane leak, for example, could result in a pocket of silane in a corner of the fab, which could explode. Arsine and phosphine, commonly used in ion implantation, are deadly in ppb and ppt, respectively. Fortunately, the semiconductor industry has an excellent safety record and danger to fab personnel is minimal — as long as established safety protocols are closely followed. This include storing gas cylinders in well monitored gas cabinets.

SUPPLIERS


ARM Inc: www.arminc.com



Composites USA: http://www.compositesusa.com



CONSCI: http://www.consci.com



Critical Process System Group: http://www.cpsgrp.com



Fab-Tech, Inc.: http://www.fabtechinc.com



MoviTHERM: http://movitherm.com



SAES Pure Gas: http://www.saespuregas.com



ARTICLES



Vacuum pump market growing at 6%. CAGR to cross $6.5B by 2024

08/20/2018  In the last few years, biggies in the Vacuum Pump Market have set different business goals to attain a dominant market position

New laser-based sample prep solution

07/12/2018  3D-Micromac AG (booth #1645 in the South Hall) this week introduced the microPREP 2.0 laser ablation system for high-volume sample preparation of metals, semiconductors, ceramics and compound materials for microstructure diagnostics and failure analysis (FA).

Subfab data growing in importance

07/11/2018  The importance of data gathered and analysed in the subfab – the place where vacuum pumps, abatements systems and other supporting equipment operates – is growing. Increasingly, manufacturers are finding that these systems have a direct impact on yield, safety, cost-of-ownership and ultimately capacity and cycle time.

3D-Micromac introduces selective laser annealing system for semiconductor and MEMS manufacturing

06/25/2018  microPRO RTP leverages optics, line scan and step-and-repeat spot options, and multiple wavelengths to provide highly versatile laser platform.

Kinetics acquires Mega Fluid Systems

03/30/2018  According to the details of the agreement, Mega Fluid Systems will operate as a Kinetics company, but will maintain its brand and product line.

Understanding ALD, MLD and SAMs as they enter the fab

03/01/2018  As the world of advanced manufacturing enters the sub-nanometer scale era, it is clear that ALD, MLD and SAM represent viable options for delivering the required few-atoms-thick layers required with uniformity, conformality, and purity.

US demand for semiconductor machinery to total $7.4B in 2021

02/16/2018  Growth in demand for wafer processing equipment will account for the majority of value growth.

CSTIC and SEMICON CHINA 2018: Brooks Instrument to present new mass flow controller with self-diagnostics​

02/09/2018  Brooks Instrument will showcase its newly enhanced GF125 mass flow controller (MFC) with high-speed EtherCAT connectivity and embedded self-diagnostics at the China Semiconductor Technology International Conference (CSTIC) in conjunction with SEMICON China 2018 in Shanghai.

Leak check semiconductor process chambers quickly and reliably

02/08/2018  INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams to easily check the tightness of vacuum chambers for wafer production.

Boston Semi Equipment develops custom automation modules for strip handling equipment

01/31/2018  Boston Semi Equipment (BSE) today announced that it has started shipping units of its new strip load/unload module to a top 10 semiconductor manufacturer.

Turbulent times ahead for trade

01/25/2018  International trade is one of the best tools to spur growth and create high-skill and high-paying jobs. Over 40 million American jobs rely on trade, and this is particularly true in the semiconductor supply chain. Over the past three decades, the semiconductor industry has averaged nearly double-digit growth rates in revenue and, by 2030, the semiconductor supply chain is forecast to reach $1 trillion.

NAURA Akrion Inc. acquired Akrion’s surface preparation business

01/18/2018  Beijing NAURA Microelectronics Equipment Co.,Ltd. and Akrion Systems LLC today jointly announced that the previously announced acquisition by NAURA has been completed.