Topic Index

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 0-9

CVD Source Materials

Thu, 12 Dec 2015
Reaction materials for chemical vapor deposition are typically delivered into the chamber in a gaseous form. The source materials can be gases or liquids.

Chemical Vapor Deposition

Fri, 12 Dec 2015
Chemical vapor deposition (CVD) is used to produce high-purity thin films.

Atomic layer deposition goes mainstream in 22nm logic technologies

Mon, 11 Nov 2010
Cost-of-ownership (COO) will be a main driver for ALD equipment selection in cost-sensitive markets; and in foundry or other logic applications, equipment choice is more a mix between COO, turn-around time and process performance considerations. M. Verghese, ASM, Phoenix, AZ USA; J. W. Maes, ASM, Leuven, Belgium; N. Kobayashi, ASM, Tokyo, Japan

ASM plasma-enhanced atomic layer deposition (ALD) ordered for HVM, new app

Thu, 4 Apr 2011

ASM International N.V. (NASDAQ: ASMI) received multiple system orders for its plasma enhanced atomic layer deposition (PEALD) reactor from a leading memory customer in Asia. The company also qualified a new PEALD oxide application with a memory manufacturer for the 2X nm node.

Understanding ALD, MLD and SAMs as they enter the fab

Thu, 3 Mar 2018
As the world of advanced manufacturing enters the sub-nanometer scale era, it is clear that ALD, MLD and SAM represent viable options for delivering the required few-atoms-thick layers required with uniformity, conformality, and purity.