deposition
Samco boosts shipment capacity with second production center

Samco, a Japan-based semiconductor processing equipment manufacturer, held a completion ceremony for its second production center on June 17.
Lam Research enables next-generation memory with industry's first ALD process for low-fluorine tungsten fill

Lam Research Corp. (NASDAQ: LRCX), an advanced manufacturer of semiconductor equipment, today introduced an atomic layer deposition (ALD) process for depositing low-fluorine-content tungsten films, the latest addition to its ALTUS family of products.
ALD tools evolve with industry needs

Veeco Instruments (Veeco) recently announced that Veeco CNT -- formerly known as Ultratech/Cambridge Nanotech -- shipped its 500th Atomic Layer Deposition (ALD) system to the North Carolina State University.
Understanding ALD, MLD and SAMs as they enter the fab

As the world of advanced manufacturing enters the sub-nanometer scale era, it is clear that ALD, MLD and SAM represent viable options for delivering the required few-atoms-thick layers required with uniformity, conformality, and purity.